Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition

J.P. Holgado; R. Escobar Galindo; A. van Veen; H. Schut; J.T.M. de Hosson; A.R. Gonzalez-Elipe

doi:10.1016/S0168-583X(02)00695-X

Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition

J.P. Holgado, R. Escobar Galindo, A. van Veen, H. Schut, J.T.M. de Hosson, A.R. Gonzalez-Elipe

Zernike Institute for Advanced Materials

Onderzoeksoutput: Article › Academic › peer review

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Originele taal-2	Dutch
Artikelnummer	PII S0168-583X(02)00695-X
Pagina's (van-tot)	333 - 345
Aantal pagina's	13
Tijdschrift	Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
Volume	194
Nummer van het tijdschrift	3
DOI's	https://doi.org/10.1016/S0168-583X(02)00695-X
Status	Published - 2002

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Holgado, J. P., Escobar Galindo, R., van Veen, A., Schut, H., de Hosson, J. T. M., & Gonzalez-Elipe, A. R. (2002). Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, 194(3), 333 - 345. Artikel PII S0168-583X(02)00695-X. https://doi.org/10.1016/S0168-583X(02)00695-X

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keywords = "chemical vapour deposition, ion bombardment, thin film, positron annihilation, phase transformation, ion assisted deposition, ZrO2, CHEMICAL-VAPOR-DEPOSITION, STABILIZED ZIRCONIA FILMS, INDUCED CVD, GROWTH, SPECTROSCOPY, LAYERS, MOCVD",

author = "J.P. Holgado and {Escobar Galindo}, R. and {van Veen}, A. and H. Schut and {de Hosson}, J.T.M. and A.R. Gonzalez-Elipe",

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Holgado, JP, Escobar Galindo, R, van Veen, A, Schut, H, de Hosson, JTM & Gonzalez-Elipe, AR 2002, 'Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition', Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, vol. 194, nr. 3, PII S0168-583X(02)00695-X, blz. 333 - 345. https://doi.org/10.1016/S0168-583X(02)00695-X

Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition. / Holgado, J.P.; Escobar Galindo, R.; van Veen, A. et al.
In: Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, Vol. 194, Nr. 3, PII S0168-583X(02)00695-X, 2002, blz. 333 - 345.

Onderzoeksoutput: Article › Academic › peer review

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T1 - Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition

AU - Holgado, J.P.

AU - Escobar Galindo, R.

AU - van Veen, A.

AU - Schut, H.

AU - de Hosson, J.T.M.

AU - Gonzalez-Elipe, A.R.

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KW - chemical vapour deposition

KW - ion bombardment

KW - thin film

KW - positron annihilation

KW - phase transformation

KW - ion assisted deposition

KW - ZrO2

KW - CHEMICAL-VAPOR-DEPOSITION

KW - STABILIZED ZIRCONIA FILMS

KW - INDUCED CVD

KW - GROWTH

KW - SPECTROSCOPY

KW - LAYERS

KW - MOCVD

U2 - 10.1016/S0168-583X(02)00695-X

DO - 10.1016/S0168-583X(02)00695-X

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SP - 333

EP - 345

JO - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms

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Holgado JP, Escobar Galindo R, van Veen A, Schut H, de Hosson JTM, Gonzalez-Elipe AR. Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms. 2002;194(3):333 - 345. PII S0168-583X(02)00695-X. doi: 10.1016/S0168-583X(02)00695-X